Stray Light Analysis 工程目標 -Ana lyze the stray light caused by multiple reflections between optical surfaces and reflection and scattering of non-optical surfaces, locate the stray light and eliminate
An update on the Chinese EUV light source: New Options for Synchrotron Light Sources中國極紫外光源的更新:同步加速器光源的新選擇It seems the basic research is complete and the method completely different than of ASML’s.
These can all be achieved through the result items in Moldex3D Studio and the results from the tools such as probe and measurement with settings in the DOE Wizard.